Apparatus and Method for Improved Perpendicular Recording Medium Using Ion Implantation in a Magnetic Field
AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorsAlexander C. Kontos, Frank Sinclair, Rajesh Dorai
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Abstract
In one embodiment, a system for treating a magnetic layer includes an ion source to generate an ion beam containing ions of a desired species. The system may also include a magnetic alignment apparatus downstream of the ion source and proximate to the substrate, wherein the magnetic alignment apparatus is operable to apply a magnetic field to the magnetic layer in the substrate along a direction out of plane relative to the magnetic layer.
Claims21
A system for treating having a magnetic layer, comprising:
- an ion source for generating an ion beam containing ions of desired species;
- and
- a magnetic alignment apparatus downstream of the ion source and proximate to the substrate, the magnetic alignment apparatus operable to apply a magnetic field to the magnetic layer in the substrate along a direction out of plane relative to the magnetic layer.
(canceled)
A method for treating a substrate having a magnetic layer, comprising:
- arranging a substrate that includes the magnetic layer;
- providing in a region proximate the magnetic layer a magnetic field in a direction out of plane relative to the magnetic layer;
- and
- exposing the magnetic layer of the substrate to ions directed toward the substrate along a direction parallel to the magnetic field in the region proximate the magnetic layer.
Dependencies are inferred from the claim text.