Method of controlling a gas decomposition reactor by raman spectrometry
AssigneeMEMC Electronic Materials, Inc.
InventorsAlexis Grabbe, Pramatha Payra
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Abstract
A method for determining the efficiency of a chemical conversion within a gas decomposition reactor having an inlet and an exhaust outlet is disclosed. The method includes measuring a chemical composition of an exhaust gas located within the exhaust outlet using Raman spectra. The measured chemical composition is compared to a set of values. A flow of an inlet gas through the inlet is adjusted to change a subsequently measured chemical composition of a subsequent exhaust gas located within the gas outlet.
Claims16
A method of determining an efficiency of chemical conversion within a gas decomposition reactor having an inlet and an exhaust outlet, the method comprising:
- measuring a chemical composition of an exhaust gas located within the exhaust outlet using Raman spectra;
- comparing the measured chemical composition of the exhaust gas to a set of values;
- and
- adjusting a flow of an inlet gas through the inlet to change a subsequently measured chemical composition of a subsequent exhaust gas located within the gas outlet.
A method of determining an efficiency of chemical conversion within a gas decomposition reactor having a feedback control system, the method comprising:
- measuring an oligomer concentration using a Raman spectrometer;
- correlating reactor conditions to the oligomer concentration;
- and
- adjusting process conditions in real time.
Dependencies are inferred from the claim text.