Shutter blade and robot blade with cte compensation

A processing chamber element positioning system, comprising:

• an actuator coupled to a portion of a processing chamber;
• a positioning member comprising a positioning body that has a first CTE, wherein the positioning body further comprises:
• an anchoring end that is coupled to the actuator, wherein a reference axis extends through the anchoring end and the actuator;
• and
• a distal free end having a coupling point that is separated from the reference axis by a first distance;
• and
• a thermal compensating member comprising a thermal compensating body that has a second CTE greater than the first CTE, and the thermal compensating body comprises:
• a connection point that is coupled to the positioning member body at the coupling point, wherein the thermal compensating body extends from the connection point, towards the reference axis, to a movable end;
• and
• an attachment point separated from the reference axis by a second distance that is less than the first distance,
• wherein a third distance is defined by a difference between the first distance and the second distance, and a distance ratio of the first distance to the third distance is substantially equal to a CTE ratio of the second CTE to the first CTE.

A processing chamber element positioning system, comprising:

• a positioning member comprising a positioning body that has a first CTE, wherein the positioning body further comprises:
• a distal free end;
• and
• an anchoring end that is coupled to a rotary actuator, which has a rotary axis extending through the rotary actuator, wherein the positioning body extends a first radial distance from the rotary axis to a coupling point;
• and
• a thermal compensating member comprising a thermal compensating body that has a second CTE greater than the first CTE, and the thermal compensating body comprises:
• a fixed end that is coupled to the positioning member at the coupling point;
• and
• a movable end having an attachment point that is positioned closer to the movable end than to the fixed end and is separated from the rotary axis by a second radial distance, which is less than the first radial distance,
• wherein a third distance is defined by a difference between the first distance and the second distance, and a distance ratio of the first distance to the third distance is substantially equal to a CTE ratio of the second CTE to the first CTE.