# US 2014/0270905 A1 · Rotary flex union > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0270905 A1 - Document ID: US20140270905A1 - Status: Published application - Kind: A1 - Application number: 13/799,089 - Filed: 2013-03-13 - Published: 2014-09-18 - Earliest claimed: 2013-03-13 - Assignees: Varian Semiconductor Equipment Associates, Inc. - Applicants: Varian Semiconductor Equipment Associates, Inc. - Inventors: Arthur P. Riaf - Web page: https://patentgrep.com/patent/US20140270905A1 ## CPC - F16C 11/04: Pivotal connections (hinges for doors, windows or wings E05D) - H01J 37/20: Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support - H01J 37/3171: {for ion implantation} - H01J 2237/002: Cooling arrangements - H01J 2237/2001: Maintaining constant desired temperature - F16C: SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A rotary union is disclosed for use in semiconductor processing applications. The rotary is coupled between a platen base and a platen of a rotating platen assembly. The rotary union includes a coiled flexible tube member for passing a flow of cryogenic fluid to the platen for cooling during an ion implant procedure. The coiled flexible tube member has a first configuration associated with a non-rotated position of the platen and a second configuration associated with a rotated position of the platen. In the first configuration the coiled flexible tube member has a first bend radius, and in the second configuration the coiled flexible tube member has a second bend radius that is smaller than first bend radius. The rotary union also includes a base with a peripheral wall that restricts movement of the coiled flexible tube member as it cycles between the first and second configurations. ## Claims ### Claim 1 A rotary platen apparatus, comprising: a platen base; a platen rotatably coupled to the platen base; and a rotary union for supplying cryogenic fluid to cool the platen, the rotary union coupled between the platen base and the platen, the rotary union comprising a coiled flexible tube member, the coiled flexible tube member having a first configuration associated with a non-rotated position of the platen and a second configuration associated with a rotated position of the platen; wherein in the first configuration the coiled flexible tube member has a first bend radius, and in the second configuration the coiled flexible tube member has a second bend radius, the first and second bend radii being different. ### Claim 2 (depends on 1) The rotary platen apparatus of claim 1, wherein the second bend radius is smaller than the first bend radius. ### Claim 3 (depends on 1) The rotary platen apparatus of claim 1, further comprising first and second tube couplings associated with first and second ends of the coiled flexible tube member, the first tube coupling for receiving cryogenic fluid from a cryogenic fluid source, the second tube coupling for supplying cryogenic fluid to the platen. ### Claim 4 (depends on 1) The rotary platen apparatus of claim 1, the rotary union further comprising a clamp member for controllably restraining movement of the coiled flexible tube member as the coiled flexible tube member moves between the first configuration and the second configuration. ### Claim 5 (depends on 1) The rotary platen apparatus of claim 1, the rotary union further comprising a union base member having a peripheral outer wall for controllably restraining movement of the coiled flexible tube member as the coiled flexible tube member moves between the first configuration and the second configuration. ### Claim 6 (depends on 1) The rotary platen apparatus of claim 1, further comprising a drive block portion coupled between the coiled flexible tube and the first tube coupling, the drive block portion comprising a fluid channel to allow cryogenic fluid to flow between the coiled flexible tube and the first tube coupling. ### Claim 7 (depends on 6) The rotary platen apparatus of claim 6, further comprising a stem coupled to the drive block portion, the stem being rotatably coupled to a base portion of the rotary union, the base portion fixed to the platen base. ### Claim 8 (depends on 7) The rotary platen apparatus of claim 7, further comprising a guard member fixed in relation to the platen, the guard member coupled to the drive block portion, the guard member configured to transmit a rotational force through the rotary union as the platen and the platen base rotate with respect to each other. ### Claim 9 (depends on 1) The rotary platen apparatus of claim 1, further comprising a base member having a peripheral outer wall and a cover connected to the base member, wherein the base member, peripheral outer wall and cover are configured for controllably restraining movement of the coiled flexible tube member as the coiled flexible tube member moves between the first configuration and the second configuration. ### Claim 10 (depends on 1) The rotary platen apparatus of claim 1, further comprising a second rotary union for draining cryogenic fluid away from the platen, the second rotary union coupled between the platen base and the platen, the second rotary union comprising a coiled flexible tube member, the coiled flexible tube member having a first configuration associated with an non-rotated position of the platen and a second configuration associated with a rotated position of the platen; wherein in the first configuration the coiled flexible tube member has a first bend radius, and in the second configuration the coiled flexible tube member has a second bend radius, the first and second bend radii being different. ### Claim 11 A rotary flex union for use in semiconductor processing, the union comprising: a base portion; a stem rotatably coupled to the base portion; a drive block portion connected at a first end to the stem and at the second end to a first tube fitting; and a coiled flexible tube member having first and second ends, the first end coupled to the drive block portion, the second end coupled to a second tube fitting; wherein the coiled flexible tube member has a first configuration associated with an non-rotated position of the union and a second configuration associated with a rotated position of the union; and wherein in the first configuration the coiled flexible tube member has a first bend radius, and in the second configuration the coiled flexible tube member has a second bend radius, the first and second bend radii being different. ### Claim 12 (depends on 11) The rotary flex union of claim 11, wherein the second bend radius is smaller than the first bend radius. ### Claim 13 (depends on 11) The rotary flex union of claim 11, the first tube coupling for receiving cryogenic fluid from a cryogenic fluid source, the second tube coupling for supplying cryogenic fluid to a platen. ### Claim 14 (depends on 11) The rotary flex union of claim 11, the rotary union further comprising a clamp member for controllably restraining movement of the coiled flexible tube member as the coiled flexible tube member moves between the first configuration and the second configuration. ### Claim 15 (depends on 11) The rotary flex union of claim 11, the base portion further having a peripheral outer wall for controllably restraining movement of the coiled flexible tube member as the coiled flexible tube member moves between the first configuration and the second configuration. ### Claim 16 (depends on 11) The rotary flex union of claim 11, the drive block portion comprising a fluid channel to allow cryogenic fluid to flow between the coiled flexible tube and the first tube coupling. ### Claim 17 (depends on 11) The rotary flex union of claim 11, wherein the base portion has a peripheral outer wall and a cover connected to the base portion, and wherein the base portion, peripheral outer wall and cover are configured to controllably restrain movement of the coiled flexible tube member as the coiled flexible tube member moves between the first configuration and the second configuration. ### Claim 18 A rotary platen apparatus, comprising: a platen base having a platen rotatably coupled thereto; and a rotary union for supplying cryogenic fluid from a fluid source to cool the platen, the rotary union coupled between the platen base and the platen, the rotary union comprising a coiled flexible tube member having a first configuration associated with a non-rotated position of the platen and a second configuration associated with a rotated position of the platen; wherein in the first configuration the coiled flexible tube member has a first bend radius, and in the second configuration the coiled flexible tube member has a second bend radius that is smaller than the first radius. ### Claim 19 (depends on 18) The rotary platen apparatus of claim 18, wherein the coiled flexible tube member comprises hydroformed stainless steel flexible tubing. ### Claim 20 (depends on 18) The rotary platen apparatus of claim 18, the rotary union further comprising a union base member having a peripheral outer wall for controllably restraining movement of the coiled flexible tube member as the coiled flexible tube member moves between the first configuration and the second configuration.