Thermal management apparatus for solid state light source arrays
AssigneeApplied Materials, Inc.
InventorsJOHN GERLING, JOSEPH M. RANISH
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Abstract
Apparatus for providing pulsed or continuous energy in a process chamber are provided herein. The apparatus may include a process chamber comprising a chamber body, a solid state light source array, having a plurality of solid state light sources disposed on a first substrate, to provide pulsed or continuous energy to the process chamber, and a cooling mechanism including a band pass filter to reduce an amount of reflected light from heating the solid state source array.
Claims20
An apparatus for providing pulsed or continuous energy in a process chamber, the apparatus comprising:
- a process chamber comprising a chamber body;
- a solid state light source array, having a plurality of solid state light sources disposed on a first substrate, to provide pulsed or continuous energy in the process chamber;
- and
- a cooling mechanism including a band pass filter to reduce an amount of reflected light from heating the solid state source array.
An apparatus for providing pulsed or continuous energy in a process chamber, the apparatus comprising:
- a process chamber comprising a chamber body;
- a solid state light source array, having a plurality of solid state light sources, disposed on a first substrate, to provide pulsed or continuous energy to the process chamber;
- and
- a cooling mechanism including a transparent window disposed over the solid state light source array, the transparent window at least partially defining a cooling channel disposed between the plurality of solid state light sources and the transparent window to flow a coolant over the plurality of solid state light sources.
An apparatus for providing pulsed or continuous energy in a process chamber, the apparatus comprising:
- a process chamber comprising a chamber body;
- a solid state light source array, having a plurality of solid state light sources, disposed on a first surface of a substrate, to provide pulsed or continuous energy to the process chamber;
- and
- a cooling mechanism coupled to a second surface of the substrate to remove heat from the solid state light source array, the cooling mechanism including a base plate, a top plate, and a plurality of fins disposed between the base plate and the top plate.
Dependencies are inferred from the claim text.