Back to results
US 2014/0270642 A1Published application
Photonics grating coupler and method of manufacture
AssigneeMicron Technology, Inc.
InventorHarel Frish
Life of this patent
Estimating the term…
Abstract
A structure for coupling an optical signal between an integrated circuit photonic structure and an external optical fiber is disclosed as in a method of formation. The coupling structure is sloped relative to a horizontal surface of the photonic structure such that light entering or leaving the photonic structure is substantially normal to its upper surface.
Claims45
A photonic structure comprising:
- a substrate;
- a photonic element supported by the substrate and having horizontal portion and a sloped portion coupled to the horizontal portion;
- and
- a grating formed at the sloped portion for directing light into or out of the photonic element.
1 more element
A photonic coupler, comprising:
- a lower cladding material over a substrate, the lower cladding material having a first horizontal portion with an upper surface which is substantially parallel to the upper surface of the substrate and a second portion contiguous with the first portion which has an upper surface with an upward slope relative to the upper surface of the first portion;
- a waveguide core material provided over the first and second portions of the lower cladding material such that the waveguide core material has a first horizontal portion provided over the first portion of the lower cladding material and a second portion provided over the second portion of the lower cladding material, the second portion of the waveguide core having an upward slope relative to the first horizontal portion of the waveguide core;
- and,
- a grating coupler formed in an upper surface of the second portion of the waveguide core, the grating coupler being arranged to transmit or receive light passing through the waveguide core.
1 more element
A method of forming a photonic structure, the method comprising:
- forming a waveguide core having a horizontal portion and a contiguous sloped portion over a lower cladding material;
- and
- forming an optical grating in the sloped portion of the waveguide core.
Dependencies are inferred from the claim text.