Optical waveguide network of an interconnecting ic module
AssigneeAPIC Corporation
InventorsBirendra Dutt, Ashok Kumar Kapoor
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Abstract
The subject matter disclosed herein relates to a photonic module comprising: a silicon-on-insulator (SOI) wafer; one or more photonic components on the SOI wafer; a plurality of metal pads to receive integrated circuit (IC) chips to be mounted on the SOI wafer; silicon optical waveguides to transfer optical signals among terminals of individual the IC chips, wherein the silicon optical waveguides comprise portions of the SOI wafer; and silica optical waveguides to transfer optical signals among terminals of different the IC chips.
Claims26
A photonic module comprising:
- a silicon-on-insulator (SOI) wafer;
- one or more photonic components on said SOI wafer;
- a plurality of metal pads to receive integrated circuit (IC) chips to be mounted on said SOI wafer;
- silicon optical waveguides to transfer optical signals among terminals of individual said IC chips, wherein said silicon optical waveguides comprise portions of said SOI wafer;
- and
- silica optical waveguides to transfer optical signals among terminals of different said IC chips.
A method of fabricating a photonic module, the method comprising:
- forming a plurality of optical resonators, optical modulators, diode lasers, and/or optical filters on a silicon-on-insulator (SOI) wafer;
- etching a portion of said SOI wafer to form silicon optical waveguides;
- and
- forming silica optical waveguides on said SOI wafer, so that said silica optical waveguides interconnect with said silicon optical waveguides.
A method of fabricating a photonic module, the method comprising:
- etching a silicon-on-insulator (SOI) wafer to establish locations of a plurality of photonic components and to form silicon optical waveguides;
- depositing a silicon dioxide film including germanium-oxide doping on the etched SOI layer;
- annealing said silicon dioxide-based film to form a silica layer;
- and
- patterning said silica layer by lithography and etching to form a silica optical waveguide coupled to said silicon optical waveguides.
Dependencies are inferred from the claim text.