Substrate processing apparatus, simulation apparatus, storage medium and simulation method

A simulation apparatus configured to simulate a path in which a gas for processing a substrate flows through a piping introduced into a processing chamber configured to process the substrate, the simulation apparatus comprising:

• an information acquisition unit configured to acquire gas flow information defined by an operation mode in which the substrate is processed;
• a path determination unit configured to determine a gas path based on the gas flow information acquired by the information acquisition unit;
• and
• a simulation unit configured to simulate a flow of the gas by putting a color on the gas path determined by the path determination unit, where the color is defined according to the type of gas.

A non-transitory computer readable storage medium for storing computer program adapted to cause a computer to execute a process of simulating a path in which a gas for processing a substrate flows through a piping introduced into a processing chamber configured to process the substrate, the process comprising:

• acquiring gas flow information defined by an operation mode in which the substrate is processed;
• determining a gas path based on the acquired gas flow information;
• and
• simulating a flow of the gas by putting a color defined according to the type of gas on the determined gas path.

A simulation method of simulating a path in which a gas for processing a substrate flows through a piping introduced into a substrate processing chamber configured to process the substrate, the method comprising:

• acquiring gas flow information defined by an operation mode in which the substrate is processed;
• determining a gas path based on the acquired gas flow information;
• and
• simulating a flow of the gas by putting a color defined according to the type of gas on the determined gas path.