Cloud-based architecture for analysis and prediction of integrated tool-related and material-related data and methods therefor
OwnerTom Thuy Ho, Weidong Wanginventors
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Abstract
Cloud-based integrated yield/equipment data processing system for collecting and analyzing integrated tool-related data (cause data) and material-related data (effect data) pertaining to at least one material processing tool and at least one material is disclosed. In an embodiment, the tool-related data is correlated with the material-related data and the correlated tool-related data and material-related data is employed by logic to perform, using a cloud computing approach, at least one of root-cause analysis, prediction model building and tool control/optimization.
Claims20
A cloud-based integrated yield/equipment data processing system for collecting and analyzing integrated tool related data and material-related data pertaining to at least one material processing tool and at least one material, comprising:
- at least a first module for collecting said tool-related data pertaining to said at least one material processing tool:
- at least a second module for collecting said material-related data pertaining to said at least one material:
- first logic for correlating said tool-related data with said material-related data, thereby obtaining correlated tool-related data and material-related data and second logic for analyzing said correlated tool-related data and material-related data to perform at least one of root-cause analysis, prediction model building and tool control/optimization, wherein at least one of said first logic, and said second logic is implemented using a cloud computing approach.
An cloud-based integrated yield/equipment data processing system for collecting and analyzing integrated tool-related data and material-related data pertaining to at least one material processing tool and at least one material, comprising:
- means for collecting said tool-related data pertaining to said at least one material processing tool and said material-related data pertaining to said at least one material;
- means for correlating said tool-related data with said material-related data, thereby obtaining correlated tool-related data and material-related data;
- and
- means for analyzing said correlated tool-related data and material-related data to perform at least one of root-cause analysis, prediction model building and tool control/optimization, wherein at least one of means for correlating and said means for collecting is implemented using a cloud computing approach.
Dependencies are inferred from the claim text.