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US 2014/0236337 A1Published application
Pattern inspection method and manufacturing control system
AssigneeKabushiki Kaisha Toshiba
InventorsKenji Kawabata, Toru Koike, Kenichi Kadota
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Abstract
In accordance with an embodiment, a pattern inspection method includes modeling a shape simulation of a pattern, performing in-line measurement with respect to control parameters which are to be controlled in a manufacturing process of the pattern, executing the shape simulation by using a result of the in-line measurement, and judging acceptance of a pattern shape based on a result of the shape simulation.
Claims18
A pattern inspection method comprising:
- modeling a shape simulation of a pattern;
- performing in-line measurement with respect to control parameters which are to be controlled in a manufacturing process of the pattern;
- executing the shape simulation by using a result of the in-line measurement;
- and
- judging acceptance of a pattern shape based on a result of the shape simulation.
2 more elements
A manufacturing control system comprising:
- a process flow control section which controls a manufacturing process of an external manufacturing apparatus;
- a shape simulating section which is connected to an external measurement apparatus, receives in-line measurement data, and executes a shape simulation of a pattern;
- a simulation result digitizing section which digitizes shape features of the pattern from a simulation result of the shape simulating section and outputs them;
- and
- an acceptance judgment section which judges acceptance of the pattern based on output data from the simulation result digitizing section, and, in a case of unacceptance, supplies information on the unacceptance to the process flow control section.
2 more elements
Dependencies are inferred from the claim text.