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US 2014/0235027 A1Published application
Silicon carrier space transformer and temporary chip attach burn-in vehicle for high density connections
AssigneeInternational Business Machines Corporation
InventorsHarvey Hamel, John Ulrich Knickerbocker, Samuel McKnight, Chirag S. Patel
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Abstract
A silicon carrier space transformer assembly includes one or more silicon structures, which provide space transformer scaling to permit interconnection for fine pitch input/output interconnections with a semiconductor die or wafer, and fine pitch test probe tips connected to the one or more silicon structures.
Claims4
A method of fabricating a silicon carrier space transformer, comprising:
- etching a wafer to form etched vertical holes in the wafer;
- forming via insulation and metallization using thermal oxidation;
- forming back-end-of-line wiring to form X-Y wiring interconnections for space transformation connections, power and ground;
- forming at least one of surface pads, microbumps or copper interconnections;
- and
- forming a number of probe tips on the wafer.
3 more elements
Dependencies are inferred from the claim text.