Process of structuring an active organic layer deposited on a substrate
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsMarie HEITZMANN, Simon CHARLOT
Life of this patent
Estimating the term…
Abstract
A method of structuring an active organic layer deposited on a substrate, including depositing a sacrificial layer on the substrate by photolithography, the sacrificial layer being made of at least one resist, creating at least one pattern inside of the sacrificial layer, depositing an active organic layer on the sacrificial layer and in the pattern, depositing a protective layer made of organic polymer on the active layer and in the pattern of the resist sacrificial layer, removing the sacrificial layer by projection of a solvent on the resin forming the layer, and removing the protective layer by dissolving the polymer forming it in a solvent.
Claims11
A method of structuring an active organic layer deposited on a substrate, wherein it comprises:
- depositing a sacrificial layer on the substrate by photolithography, said sacrificial layer being made of at least one resist,
- creating at least one opening inside of the sacrificial layer defining a pattern,
- depositing an active organic layer on the sacrificial layer and in the pattern,
- depositing a protective layer made of organic polymer on the active layer and in the pattern of said sacrificial layer,
- removing the sacrificial layer by projection of a solvent on the resin forming said layer, and
- removing the protective layer by dissolving the polymer forming it in a solvent.
Dependencies are inferred from the claim text.