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US 2014/0235012 A1Published application
Deposition of patterned organic thin films
AssigneeUniversal Display Corporation
InventorsGregory McGraw, Paul E. Burrows, Siddharth Harikrishna Mohan
Life of this patent
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Abstract
Embodiments disclosed herein provide devices having a nozzle die with one or more nozzles, each of which has one or more integrated skimmers. The use of an integrated nozzle/skimmer structure allows for higher-resolution printing in OVJP-type deposition techniques without requiring the use of a shadow mask by allowing for a relatively narrow organic material beam that can be placed at relatively high distances away from the substrate.
Claims49
A device comprising:
- at least one inlet via;
- a plurality of nozzles, each nozzle in fluid communication with at least one inlet via and each nozzle having an aperture width a;
- a first plurality of skimmers, each skimmer of the first plurality of skimmers aligned with an associated nozzle of the plurality of nozzles and having an orifice width s and an output width w, the orifice disposed a distance D from an outer edge of the associated nozzle;
- and
- a plurality of exhaust cavities, each exhaust cavity in fluid communication with at least one of the plurality of nozzles, wherein each cavity is disposed between one of the plurality of nozzles and one of the plurality of skimmers.
2 more elements
A method comprising:
- providing a first carrier gas and a first organic material to a first nozzle die, the first nozzle die comprising:
- at least one inlet via;
- a plurality of nozzles, each nozzle in fluid communication with at least one of the at least one inlet via and having an aperture width a;
- a first plurality of skimmers, each skimmer of the first plurality of skimmers aligned with an associated nozzle of the plurality of nozzles and having an orifice width s and an output width w, the orifice disposed a distance D from an outer edge of the associated nozzle;
- and
- a plurality of exhaust cavities, each exhaust cavity in fluid communication with at least one of the plurality of nozzles, wherein each exhaust cavity is disposed between one of the plurality of nozzles and one of the plurality of skimmers;
- and
- ejecting the first carrier gas and the first organic material from the first nozzle die toward a substrate disposed below at least one of the first plurality of skimmers.
5 more elements
A method comprising:
- obtaining a block of nozzle die material;
- etching at least one inlet via into the block;
- etching a plurality of nozzles into the block, each nozzle etched to be in fluid communication with at least one of the at least one inlet via and having an aperture width a;
- etching a first plurality of skimmers into the block, each skimmer of the first plurality of skimmers etched to align with an associated nozzle of the plurality of nozzles and having an orifice width s and an output width w, the orifice disposed a distance D from an outer edge of the associated nozzle;
- and
- etching a plurality of exhaust cavities, each exhaust cavity etched to be in fluid communication with at least one or the plurality of nozzles and disposed between one of the plurality of nozzles and one of the plurality of skimmers.
3 more elements
Dependencies are inferred from the claim text.