Method for making an imager device
AssigneeCommissariat A L'energie Atomique Et Aux Ene Alt
InventorCecilia DUPRE
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Abstract
A method for making an imager device including the implementation of the steps of: making, through a layer of electric insulating material within which are made one or more pixels each including an antenna able to pick up an electromagnetic wave received at said pixel, of an aperture forming an access to a layer of sacrificial material provided between the layer of electric insulating material and a reflective layer able to reflect said electromagnetic wave; removing part of the layer of sacrificial material through the aperture, forming between the reflective layer and the layer of electric insulating material at least one optical cavity.
Claims16
A method for making an imager device including at least the implementation of the steps of:
- making, through at least one layer of electric insulating material within which are made one or more pixels each including at least one antenna able to pick up at least one electromagnetic wave received at said pixel, of at least an aperture forming an access to at least one layer of sacrificial material provided between the layer of electric insulating material and at least one reflective layer able to reflect said electromagnetic wave;
- removing at least part of the layer of sacrificial material through the aperture, forming between the reflective layer and the layer of electric insulating material at least one optical cavity.
Dependencies are inferred from the claim text.