Thermal spray powder and film that contain rare-earth element, and member provided with film
AssigneesFujimi Incorporated, Tokyo Electron Limited
InventorsHiroaki Mizuno, Junya Kitamura, Yoshiyuki Kobayashi
Life of this patent
Estimating the term…
Abstract
A thermal spray powder of the present invention contains a rare earth element and a diluent element that is not a rare earth element or oxygen, which is at least one element selected, for example, from zinc, silicon, boron, phosphorus, titanium, calcium, strontium, and magnesium. A sintered body of a single oxide of the diluent element has an erosion rate under specific etching conditions that is no less than 5 times the erosion rate of an yttrium oxide sintered body under the same etching conditions.
Claims11
A thermal spray powder comprising a rare earth element and a first diluent element that is not a rare earth element or oxygen, wherein under etching conditions of applying high frequency power of 1,300 W and 13.56 MHz for 20 hours while supplying an etching gas that is a 95:950:10 volume ratio mixture of carbon tetrafluoride, argon, and oxygen at a flow rate of 1.055 L/minute inside a chamber of a parallel plate plasma etching apparatus maintained at a pressure of 133.3 Pa, a sintered body of a single oxide of the first diluent element has an erosion rate of no less than 5 times the erosion rate of an yttrium oxide sintered body under the same etching conditions.
A coating comprising a rare earth element and a first diluent element that is not a rare earth element or oxygen, wherein under etching conditions of applying high frequency power of 1,300 W and 13.56 MHz for 20 hours while supplying an etching gas that is a 95:950:10 volume ratio mixture of carbon tetrafluoride, argon, and oxygen at a flow rate of 1.055 L/minute inside a chamber of a parallel plate plasma etching apparatus maintained at a pressure of 133.3 Pa, a sintered body of a single oxide of the first diluent element has an erosion rate of no less than 5 times the erosion rate of an yttrium oxide sintered body under the same etching conditions.
Dependencies are inferred from the claim text.