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US 2014/0234568 A1Published application
Sapphire substrate
AssigneeSaint-Gobain Ceramics & Plastics, Inc.
InventorsBrahmanandam V. Tanikella, Palaniappan Chinnakaruppan, Robert A. Rizzuto, Isaac K. Cherian, Ramanujam Vedantham, Matthew A. Simpson
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Abstract
A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 μm/cm2, wherein nTTV is total thickness variation normalized for surface area of the generally planar surface, the substrate having a diameter not less than about 9.0 cm.
Claims20
A sapphire substrate having:
- a ratio of diameter:thickness not less than 124:1;
- and
- a major surface having a property, wherein the property includes:
- a normalized bow of the major surface is not greater than 0.100 μm/cm2, wherein the normalized bow is a bow measurement of the major surface normalized for a surface area of the major surface;
- a normalized flatness of the major surface is not greater than 0.100 μm/cm2, wherein the normalized flatness is a flatness measurement of the major surface normalized for a surface area of the major surface;
- a normalized warp of the major surface is not greater than about 0.190 μm/cm2, wherein the normalized warp is a warp measurement of the major surface normalized for a surface area of the major surface;
- or
- any combination thereof.
5 more elements
A sapphire substrate having:
- a generally planar surface along the c-plane or tilted away from the c-plane at a tilt angle of not greater than about 2.0°;
- diameter of at least 7.5 cm;
- a ratio of diameter:thickness not less than 124:1;
- and
- a major surface having at least two properties, wherein the at least two properties are selected from a group consisting of:
- a normalized bow of the major surface is not greater than 0.100 μm/cm2, wherein the normalized bow is a bow measurement of the major surface normalized for a surface area of the major surface;
- a normalized flatness of the major surface is not greater than 0.100 μm/cm2, wherein the normalized flatness is a flatness measurement of the major surface normalized for a surface area of the major surface;
- and
- a normalized warp of the major surface is not greater than about 0.190 μm/cm2, wherein the normalized warp is a warp measurement of the major surface normalized for a surface area of the major surface.
6 more elements
Dependencies are inferred from the claim text.