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US 2014/0234529 A1Published application
Sample, sample fabrication apparatus, and sample observation method
AssigneeKabushiki Kaisha Toshiba
InventorFumihiko SAIJO
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Abstract
In accordance with an embodiment, a sample includes a base material and a metal-based heavy element compound. The base material includes a tunnel structure portion with a cavity portion. The metal-based heavy element compound fills the cavity portion of the tunnel structure portion. The metal-based heavy element compound has a thickness that at least locally allows passage of electromagnetic radiations.
Claims20
A sample comprising:
- a base material comprising a tunnel structure portion comprising a cavity portion;
- and
- a metal-based heavy element compound which fills the cavity portion of the tunnel structure portion,
- wherein the metal-based heavy element compound has a thickness that at least locally allows passage of electromagnetic radiations.
1 more element
A sample fabrication apparatus comprising:
- a chamber which accommodates a wafer piece comprising a base material comprising a tunnel structure portion;
- a gas source which supplies a gas comprising a metal-based heavy element to the chamber through a cavity of the tunnel structure portion;
- a gas recovery unit which recovers the gas that has passed through the cavity;
- and
- a gas flow rate control unit which controls a flow rate of the gas.
2 more elements
A sample observation method comprising:
- fabricating a sample which comprises a base material comprising a tunnel structure portion, and a metal-based heavy element compound which fills a cavity of the tunnel structure portion and has a thickness which at least locally allows passage of electromagnetic radiations;
- and
- applying electromagnetic radiations to the sample and performing observation through the metal-based heavy element compound.
Dependencies are inferred from the claim text.