Mold blank, master mold, method of manufacturing copy mold and mold blank
AssigneeHoya Corporation
InventorsKazutake Taniguchi, Shuji Kishimoto, Takashi Sato
Life of this patent
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Abstract
There is provided a mold blank comprising a hard mask, wherein the hard mask layer has a composition containing chromium, nitrogen, and oxygen and has a content variation structure in which content of the nitrogen is varied continuously or gradually in a layer thickness direction and content of the oxygen is varied in the layer thickness direction continuously or gradually substantially in an opposite direction to the nitrogen.
Claims11
A mold blank comprising a substrate and a hard mask layer formed on the substrate as a mask material when etching is applied to the substrate, wherein the hard mask layer has a composition containing chromium, nitrogen, and oxygen and has a content variation structure in which content of the nitrogen is varied continuously or gradually in a layer thickness direction and content of the oxygen is varied in the layer thickness direction continuously or gradually substantially in an opposite direction to the nitrogen.
A mold blank comprising a substrate and a hard mask layer formed on the substrate as a mask material when etching is applied to the substrate, wherein the hard mask layer has a composition including a metal material having resistance to etching and electro-conductivity, and has an oxidized portion formed in the vicinity of a surface area on an opposite side of the substrate, and containing an oxidation inhibiting material in a substrate side area for inhibiting a spread of the oxidized portion over the whole body of the hard mask layer in a layer thickness direction.
A method of manufacturing a mold blank comprising a substrate and a hard mask layer formed on the substrate as a mask material when etching is applied to the substrate, the method comprising:
- a first step of forming the hard mask layer having a composition containing chromium and nitrogen on the substrate;
- and
- a second step of forming an oxidized portion in the vicinity of a surface area on an opposite side of the substrate in the hard mask layer, and inhibiting a spread of the oxidized portion over the whole body of the hard mask layer in a layer thickness direction by making the nitrogen function as an oxidation inhibiting material.
Dependencies are inferred from the claim text.