Systems and methods for capture, storage, and supplying phosphine gas
AssigneeAdvanced Technology Materials, Inc.
InventorsJames V. McManus, Edward A. Sturm, Thomas H. Baum, J. Donald Carruthers, Joshua B. Sweeney
Life of this patent
Estimating the term…
Abstract
A system and process for generating and packaging phosphine gas, in which the process includes: reacting water and aluminum phosphide to generate phosphine, and providing the phosphine in a gas mixture at a phosphine concentration below a lower explosive limit; adsorptively removing phosphine from the gas mixture; and packaging the removed phosphine in a fluid storage and dispensing vessel.
Claims28
A method of generating and packaging phosphine, comprising:
- reacting water and aluminum phosphide to generate phosphine, and providing the phosphine in a gas mixture at a phosphine concentration below a lower explosive limit;
- adsorptively removing phosphine from the gas mixture;
- and packaging the removed phosphine in a fluid storage and dispensing vessel.
-11. (canceled)
(canceled)
-25. (canceled)
(canceled)
A phosphine generation and packaging apparatus, comprising:
- a phosphine generator adapted to react water and aluminum phosphide to generate phosphine;
- a diluent gas source arranged to supply diluent gas in such manner as to provide said phosphine in a gas mixture at a phosphine concentration below a lower explosive limit;
- adsorbent arranged to adsorptively remove phosphine from the gas mixture;
- and
- a packaging facility adapted to package the removed phosphine or adsorbent having phosphine adsorptively removed from the gas mixture adsorbed thereon in a fluid storage and dispensing vessel.
-41. (canceled)
(canceled)
-54. (canceled)
-91. (canceled)
Dependencies are inferred from the claim text.