System, method and computer program product for defect detection based on multiple references

A method for computerized detection of defects in an inspected object based on processing of an inspection image generated by collecting signals arriving from the inspected object, the method comprising:

• obtaining an inspected value representative of an analyzed pixel of the inspected image and multiple reference values, each of which is representative of a reference pixel among a plurality of reference pixels;
• for each of the reference pixels, calculating a difference between the reference value of the reference pixel and the inspected value;
• computing a representative difference value based on a plurality of the differences;
• and
• determining a presence of a defect in the analyzed pixel based on the representative difference value.

A program storage device readable by machine, tangibly embodying a program of instructions executable by the machine to perform a method for computerized detection of defects in an inspected object based on processing of an inspection image generated by collecting signals arriving from the inspected object, the method comprising:

• obtaining an inspected value representative of an analyzed pixel and multiple reference values, each of which is representative of a reference pixel among a plurality of reference pixels;
• for each of the reference pixels, calculating a difference between the reference value of the reference pixel and the inspected value;
• computing a representative difference value based on a plurality of the differences;
• and
• determining a presence of a defect in the analyzed pixel based on the representative difference value.