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AssigneeApplied Materials Israel Ltd.
InventorsMoshe Amzaleg, Yehuda Cohen, Nir Ben-David, Efrat Rozenman
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A defect detection system for computerized detection of defects in an inspected object based on processing of an inspection image generated by collecting signals arriving from the inspected object, the system including: an interface for obtaining an inspected noise-indicative value and multiple reference noise-indicative values, the inspected noise-indicative value representative of an analyzed pixel and each of the reference noise-indicative values representative of a reference pixel among a plurality of reference pixels; and a processor, including: a noise analysis module, configured to compute a representative noise-indicative value based on a plurality of noise-indicative values which includes the inspected noise-indicative value and the multiple reference noise-indicative values; and a defect analysis module, configured to calculate a defect-indicative value based on an inspected value representative of the analyzed pixel, and to determine a presence of a defect in the analyzed pixel based on the representative noise-indicative value and the defect-indicative value.
A defect detection system for computerized detection of defects in an inspected object based on processing of an inspection image generated by collecting signals arriving from the inspected object, the system comprising:
A method for computerized detection of defects in an inspected object based on processing of an inspection image generated by collecting signals arriving from the inspected object, the method comprising:
A program storage device readable by machine, tangibly embodying a program of instructions executable by the machine to perform method for computerized detection of defects in an inspected object based on processing of an inspection image generated by collecting signals arriving from the inspected object, comprising:
Dependencies are inferred from the claim text.