Exposure apparatus, method for producing device, and method for controlling exposure apparatus
AssigneeNikon Corporation
InventorsNobutaka MAGOME, Naoyuki KOBAYASHI
Life of this patent
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Abstract
A liquid immersion exposure apparatus includes a projection system, a liquid supply inlet, a liquid collection outlet, a separator fluidically connected to the liquid collection outlet, the separator separating one of liquid and gas, which have been collected via the liquid collection outlet from the other, and a flow-meter configured to measure an amount of the liquid collected via the liquid collection outlet.
Claims56
A liquid immersion exposure apparatus comprising:
- a projection system;
- a liquid supply inlet;
- a liquid collection outlet;
- a separator fluidically connected to the liquid collection outlet, the separator separating one of liquid and gas, which have been collected via the liquid collection outlet, from the other;
- and
- a flow-meter configured to measure an amount of the liquid collected via the liquid collection outlet.
A liquid immersion exposure apparatus comprising:
- a projection system;
- a liquid supply inlet;
- a liquid collection outlet;
- a separator fluidically connected to the liquid collection outlet, the separator separating one of liquid and gas collected via the liquid collection outlet from the other;
- and
- a flow-meter arranged downstream of the separator.
A liquid immersion exposure apparatus comprising:
- a projection system;
- a liquid supply inlet;
- a liquid collection outlet;
- a movable stage configured to move below and relative to the projection system, the movable stage having the liquid collection outlet;
- and
- a flow-meter fluidically connected to the liquid collection outlet.
A method for manufacturing a liquid immersion exposure apparatus, comprising:
- providing a projection system;
- providing a liquid supply inlet;
- providing a liquid collection outlet;
- providing a separator fluidically connected to the liquid collection outlet, the separator separating one of liquid and gas, which have been collected via the liquid collection outlet, from the other;
- and
- providing a flow-meter configured to measure an amount of the liquid collected via the liquid collection outlet.
A method for manufacturing a liquid immersion exposure apparatus, comprising:
- providing a projection system;
- providing a liquid supply inlet;
- providing a liquid collection outlet;
- providing a separator fluidically connected to the liquid collection outlet, the separator separating one of liquid and gas collected via the liquid collection outlet from the other;
- and
- providing a flow-meter arranged downstream of the separator.
A method for manufacturing a liquid immersion exposure apparatus, comprising:
- providing a projection system;
- providing a liquid supply inlet;
- providing a liquid collection outlet;
- providing a movable stage configured to move below and relative to the projection system, the movable stage having the liquid collection outlet;
- and
- providing a flow-meter fluidically connected to the liquid collection outlet.
A device manufacturing method comprising:
- forming a liquid immersion area on a part of an upper surface of the substrate, the liquid immersion area being formed such that the liquid immersion area covers a target area of the substrate;
- exposing the target area covered by the liquid immersion area with the exposure light;
- collecting liquid via a liquid collection outlet during the exposure;
- separating one of the liquid and gas, which have been collected via the liquid collection outlet, from the other;
- and
- measuring an amount of the liquid collected via the liquid collection outlet.
A device manufacturing method comprising:
- forming a liquid immersion area on a part of an upper surface of the substrate held by the substrate stage, the liquid immersion area being formed such that the liquid immersion area covers a target area of the substrate;
- exposing the target area covered by the liquid immersion area with an exposure light;
- collecting liquid via a liquid collection outlet of the substrate stage during the exposure;
- and
- measuring an amount of the liquid collected via the liquid collection outlet.
Dependencies are inferred from the claim text.