Deformable mirror and method for manufacturing the same
AssigneeCanon Kabushiki Kaisha
InventorsKenji Tamamori, Yasuhiro Shimada, Fumiaki Mizutani
Life of this patent
Estimating the term…
Abstract
A deformable mirror includes a mirror substrate having a continuous reflective surface and a plurality of actuators connected to the mirror substrate at a plurality of coupling portions. In the deformable mirror, the mirror substrate has first regions and a second region thicker than the first regions and the first regions are formed around the coupling portions.
Claims14
A deformable mirror, comprising:
- a mirror substrate having a continuous reflective surface;
- and
- a plurality of actuators connected to the mirror substrate at a plurality of coupling portions,
- wherein the mirror substrate has first regions and a second region thicker than the first regions and the first regions are formed around the coupling portions.
A method for manufacturing a deformable mirror including a mirror substrate having a continuous reflective surface and a plurality of actuators connected to the mirror substrate at a plurality of coupling portions, the method comprising:
- a step of preparing a first substrate including a silicon layer, an insulator layer, and a handling layer arranged in this order;
- a step of forming thin regions in the silicon layer around regions of the silicon layer that are to serve as the coupling portions, the thin regions having a smaller thickness than other portions of the silicon layer;
- a step of forming the plurality of actuators on a second substrate;
- a step of connecting the first substrate and the second substrate together by coupling coupling portions of the silicon layer with coupling portions of the actuators;
- and
- a step of removing the handling layer and the insulator layer of the first substrate.
Dependencies are inferred from the claim text.