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US 2014/0232419 A1Published application
Barrier film defect detecting method and apparatus
AssigneeSamsung Display Co., Ltd.
InventorsAlexander Voronov, Gyoo-Wan Han, Ji-Hun Jung
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Abstract
A method for detecting a defect of a barrier film includes preparing a device including an electrode and a barrier film covering the electrode, allowing a charged medium to contact a surface of the barrier film, and measuring a change in a flow of current between the charged medium and the electrode.
Claims14
A method for detecting a defect of a barrier film, the method comprising:
- preparing a device comprising an electrode and a barrier film covering the electrode;
- allowing a charged medium to contact a surface of the barrier film;
- and
- measuring a change in a flow of current between the charged medium and the electrode.
1 more element
An apparatus configured to detect a defect of a barrier film, the apparatus comprising:
- a medium supply unit configured to supply a charged medium to a surface of the barrier film of a device comprising an electrode and the barrier film covering the electrode;
- and
- a measurement unit configured to measure a change in a flow of current between the charged medium and the electrode.
Dependencies are inferred from the claim text.