Measurement of plural rf sensor devices in a pulsed rf plasma reactor
AssigneeApplied Materials, Inc.
InventorGary Leray
Life of this patent
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Abstract
In a plasma reactor having pulsed RF plasma power sources, measurements by RF sensors of nulls attributable to pulse duty cycles are replaced by non-zero measurements synthesized from prior non-zero measurements, to prevent feedback control system instabilities.
Claims12
In a plasma processing system comprising plural RF power sources and respective RF sensor devices, each of said plural RF sources having an RF frequency, a pulse frequency and a pulse duty cycle, a method of reporting of measurement values, comprising:
- repetitively obtaining individual measurement values from individual ones of said respective RF sensor devices in succession and reporting the measurement values of non-zero amplitudes;
- for each measurement value of zero amplitude obtained at a current time from a particular one of said RF sensor devices, reporting a zero amplitude only if the previous measurement values from the one RF sensor device have been zero for at least a predetermined wait time, and otherwise reporting a non-zero amplitude corresponding to an applicable one of (a) the previous measurement value or (b) the most recent non-zero measurement value.
In a plasma processing system comprising plural RF power sources and respective RF sensor devices responsive to respective ones of said plural RF sources, each of said plural RF sources having an RF frequency, a pulse frequency and a pulse duty cycle, a method of controlling the reporting of measurement values from said respective RF sensors, said method comprising:
- repetitively obtaining individual measurement values from individual ones of said respective RF sensor devices in succession;
- for each measurement value obtained at a current time from a particular one of said RF sensor devices:
- (A) if the measurement value is not zero, reporting the measurement value;
- (B) if the measurement value is zero, then:
- (1) if the previous measurement value from the same RF sensor device is not zero, reporting the previous measurement value, and starting a timer;
- (2) if the previous measurement value is zero, comparing the timer to a wait time and:
- (a) if timer exceeds the wait time, reporting zero as the measurement amplitude,
- (b) if the timer does not exceed the wait time, reporting the last non-zero measurement from the one RF sensor device.
A computer-readable medium having instructions for causing a computer to execute a method of reporting measurement values in a plasma processing system comprising plural RF power sources and respective RF sensor devices, each of said plural RF sources having an RF frequency, a pulse frequency and a pulse duty cycle, said method comprising:
- repetitively obtaining individual measurement values from individual ones of said respective RF sensor devices in succession and reporting the measurement values of non-zero amplitudes;
- for each measurement value of zero amplitude obtained at a current time from a particular one of said RF sensor devices, reporting a zero amplitude only if the previous measurement values from the one RF sensor device have been zero for at least a predetermined wait time, and otherwise reporting a non-zero amplitude corresponding to an applicable one of (a) the previous measurement value or (b) the most recent non-zero measurement value.
Dependencies are inferred from the claim text.