Temperature controlled acoustic resonator comprising heater and sense resistors
AssigneeAvago Technologies General IP (Singapore) Pte. Ltd.
InventorsSuresh Sridaran, Richard C. Ruby, Martha K. Small, Donald Lee
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Abstract
A bulk acoustic wave (BAW) resonator device comprises a heating cod disposed over a first side of the piezoelectric layer and substantially around a perimeter adjacent to the active area of the acoustic resonator, the heating coil comprising a resistor configured to receive a heater current; and a heat sensor disposed over a second side of the piezoelectric layer and opposing the first side, the heat sensor configured to adjust the heater current in response to a temperature of the heating coil.
Claims28
A bulk acoustic wave (BAW) resonator, comprising:
- a substrate comprising a cavity having a plurality of sides;
- a first electrode disposed over the cavity, the first electrode extending over at least one but not all of the sides of the cavity;
- a piezoelectric layer disposed over at least a portion of the first electrode, and extending over the at least one of the plurality of sides having the first electrode extending thereover;
- a second electrode disposed over the piezoelectric layer, a contacting overlap of the first electrode, the piezoelectric layer and the second electrode forming an active area of the acoustic resonator;
- a heating coil disposed over a first side of the piezoelectric layer and substantially around a perimeter adjacent to the active area of the acoustic resonator, the heating coil comprising a resistor configured to receive a heater current;
- a heat sensor disposed over a second side of the piezoelectric layer and opposing the first side, the heat sensor configured to adjust the heater current in response to a temperature of the heating coil.
An BAW resonator structure, comprising:
- a substrate comprising a cavity, the cavity comprising a plurality of sides;
- a pillar formed within the trench, the pillar comprising an electrical conductor disposed over an outer portion thereof;
- and
- BAW resonator supported at a central location by the pillar and suspended over the cavity, the BAW resonator comprising:
- a first electrode disposed over the cavity, the first electrode;
- a piezoelectric layer disposed over at least a portion of the first electrode;
- and a second electrode disposed over the piezoelectric layer, a contacting overlap of the first electrode, the piezoelectric layer and the second electrode forming an active area of the BAW resonator;
- a heating coil disposed over a first side of the piezoelectric layer and substantially around a perimeter adjacent to the active area of the BAW resonator, the heating coil comprising a resistor configured to receive a heater current;
- a heat sensor disposed over a second side of the piezoelectric layer and opposing the first side, the heat sensor configured to adjust the heater current in response to a temperature of the heating coil.
Dependencies are inferred from the claim text.