Piezoelectric generator, sensor node, and method of manufacturing piezoelectric generator
OwnerYasuhiro ONO, Atsuya HIRABAYASHIinventors
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Abstract
A piezoelectric generator includes: a base body; and at least one piezoelectric transducer disposed on the base body, and including a first electrode, a piezoelectric body, and a second electrode, wherein the piezoelectric transducer includes a support section fixed to the base body, and a vibrating section disposed apart from the base body, having one end connected to the support section and the other end set as a free end, and vibrating due to a vibration applied externally, and a distance between the other end of the vibrating section and the base body is larger than a distance between the one end of the vibrating section and the base body.
Claims7
A method of manufacturing a piezoelectric generator, comprising:
- forming a sacrificial layer by disposing a paste including a material to be thermally decomposed in a partial area on a base body layer using a droplet ejection process;
- disposing a first electrode layer so as to straddle the base body layer and the sacrificial layer using a droplet ejection process;
- disposing a piezoelectric body layer in paste form including piezoelectric particles on the first electrode layer using a droplet ejection process;
- disposing a second electrode layer on the piezoelectric body layer using a droplet ejection process;
- and
- firing the base body layer, the sacrificial layer, the first electrode layer, the piezoelectric body layer, and the second electrode layer.
Dependencies are inferred from the claim text.