Acoustic wave device and electronic apparatus including same
AssigneePanasonic Corporation
InventorsTOMOHIRO IWASAKI, HIROYUKI NAKAMURA, TORU YAMAJI, MITSUNORI MIYANARI, MASAHIRO YASUMI, SHOJI OKAMOTO
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AssigneePanasonic Corporation
InventorsTOMOHIRO IWASAKI, HIROYUKI NAKAMURA, TORU YAMAJI, MITSUNORI MIYANARI, MASAHIRO YASUMI, SHOJI OKAMOTO
Estimating the term…
An acoustic wave device includes a piezoelectric substrate, an IDT electrode including plural electrode fingers disposed above an upper surface of the piezoelectric substrate, a first dielectric film made of oxide disposed above the upper surface of the substrate for covering the electrode fingers, and a second dielectric film made of non-oxide disposed on upper surfaces of the electrode fingers and between the first dielectric film and each of the electrode fingers. The first dielectric film contacts the upper surface of the piezoelectric substrate at a position between electrode fingers out of the plural electrode fingers adjacent to each other. The acoustic wave device prevents the electrode fingers of the IDT electrode from corrosion.
An acoustic wave device comprising:
Dependencies are inferred from the claim text.