Micro-electro-mechanical system (mems) and related actuator bumps, methods of manufacture and design structures

A MEMS structure, comprising:

• fixed actuator electrodes and a contact point;
• a MEMS beam over the fixed actuator electrodes and the contact point;
• and
• an array of actuator electrodes in alignment with portions of the fixed actuator electrodes, which are sized and dimensioned to prevent the MEMS beam from contacting an actuator portion of the fixed actuator electrodes, wherein the array of actuator electrodes are in direct contact with and extending from at least one of an underside of the MEMS beam and a surface of the fixed actuator electrodes.

A hardware description language (HDL) design structure tangibly embodied in a machine-readable data storage medium, said HDL design structure comprising elements that when processed in a computer-aided design system comprising at least a hardware component that generates a machine-executable representation of a MEMS structure, wherein said HDL design structure comprises:

• a first set of wires on a substrate, comprising fixed actuator electrodes and a contact;
• a second set of wires above the first set of wires;
• and
• an array of mini-bumps between the first set of wires and the second set of wires, wherein the array of mini-bumps prevent portions of the second set of wires from contacting the fixed actuator electrodes, upon actuation.