Multi-axial acceleration sensor and method of manufacturing the same
AssigneePixart Imaging Inc.
InventorWei-Chung Wang
Life of this patent
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Abstract
The present invention provides a multi-axial acceleration sensor and a method of manufacturing the multi-axial acceleration sensor. The method includes: providing a substrate having a lead plane; disposing a first sensor chip onto the lead plane, wherein a wire bonding plane of the first sensor chip is perpendicular to the lead plane; and disposing a second sensor chip onto the lead plane, wherein a wire bonding plane of the second sensor chip is in parallel with the lead plane.
Claims20
A manufacturing method of a multi-axial acceleration sensor, comprising:
- providing a substrate, wherein the substrate has a lead plane;
- disposing a first acceleration sensor chip onto the lead plane, wherein a wire bonding plane of the first acceleration sensor chip is perpendicular to the lead plane;
- and
- disposing a second acceleration sensor chip onto the lead plane, wherein a wire bonding plane of the second acceleration sensor chip is in parallel with the lead plane.
A manufacturing method of a multi-axial acceleration sensor, comprising:
- providing a substrate, wherein the substrate has a lead plane;
- disposing a first acceleration sensor chip onto the lead plane, wherein a wire bonding plane of the first acceleration sensor chip is in parallel with the lead plane;
- and
- disposing a second acceleration sensor chip onto the lead plane, wherein a wire bonding plane of the second acceleration sensor chip is in parallel with the lead plane.
A multi-axial acceleration sensor, comprising:
- a substrate, having a lead plane;
- a first acceleration sensor chip, disposed onto the lead plane, wherein a wire bonding plane of the first acceleration sensor chip is perpendicular to the lead plane;
- and
- a second acceleration sensor chip, disposed onto the lead plane, wherein a wire bonding plane of the second acceleration sensor chip is in parallel with the lead plane.
Dependencies are inferred from the claim text.