Electrical component and method of manufacturing the same
AssigneeKabushiki Kaisha Toshiba
InventorTomohiro SAITO
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Abstract
According to one embodiment, an electrical component comprises a substrate, a functional element formed on the substrate, a first layer configured to form a cavity which stores the functional element on the substrate, the first layer having through holes, the first layer having a first recessed portion and a first projecting portion on an upper surface thereof, and the first layer having different film thicknesses in a direction perpendicular to a surface of the substrate, and a second layer formed on the first layer and configured to close the through holes.
Claims20
An electrical component comprising:
- a substrate;
- a functional element formed on the substrate;
- a first layer configured to form a cavity which stores the functional element on the substrate, the first layer having through holes, the first layer having a first recessed portion and a first projecting portion on an upper surface thereof, and the first layer having different film thicknesses in a direction perpendicular to the substrate surface;
- and
- a second layer formed on the first layer and configured to close the through holes.
A method of manufacturing an electrical component comprising:
- forming a first sacrificial layer on a substrate;
- forming a functional element on the first sacrificial layer;
- forming a second sacrificial layer so as to cover the functional element;
- forming a first layer on the second sacrificial layer, the first layer having a first recessed portion and a first projecting portion on an upper surface thereof, and the first layer having different film thicknesses in a direction perpendicular to the substrate surface;
- forming through holes in the first layer;
- removing the first sacrificial layer and the second sacrificial layer via the through holes to form a cavity which stores the functional element on the substrate;
- and
- forming a second layer which closes the through holes on the first layer.
Dependencies are inferred from the claim text.