Semiconductor Device
AssigneeRohm Co., Ltd.
InventorMasaru Takaishi
Life of this patent
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Abstract
Provided is a semiconductor device in which on-resistance is largely reduced. In a region (2a) of an N type epitaxial layer (2) of the semiconductor device 20, each region between neighboring trenches (3) is blocked with a depletion layer (14) formed around a trench (3) so that a current passage (12) is interrupted, while a part of the depletion layer (14) formed around the trench (3) is deleted so that the current passage (12) is opened. In a region (2b), a junction portion (8) between the N type epitaxial layer (2) and a P+ type diffusion region (7) makes a Zener diode (8).
Claims13
1-27. (canceled)
A semiconductor device comprising:
- a silicon substrate of one conductivity type;
- an epitaxial layer of the one conductivity type provided on the silicon substrate;
- a first region of an inverse conductivity type provided on the silicon substrate so as to be contiguous with the epitaxial layer and the silicon substrate;
- and
- a plurality of switching devices provided in the epitaxial layer,
- wherein a first diffusion region of the one conductivity type electrically connected to the epitaxial layer is formed in an upper region within the first region opposite from the silicon substrate.
Dependencies are inferred from the claim text.