Substrate having concave-convex pattern, light-emitting diode including the substrate, and method for fabricating the diode
AssigneeSeoul Viosys Co., Ltd.
InventorsJae Kwon Kim, Sum Geun Lee, Kyung Wan Kim, Yeo Jin Yoon, Duk II Suh, Ji Hye Kim
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Abstract
Provided are a substrate having concave-convex patterns, a light-emitting diode (LED) including the substrate, and a method of fabricating the LED. The LED includes a substrate, and concave-convex patterns disposed in an upper surface of the substrate and having convexes and concaves defined by the convexes. Unit light-emitting device having a first conductive semiconductor layer, an active layer, and a second conductive semiconductor layer disposed on the substrate in sequence is present.
Claims25
A light-emitting diode (LED), comprising:
- a substrate;
- concave-convex patterns disposed in an upper surface of the substrate, the concave-convex patterns comprising:
- convex portions, each convex portion comprising facets that are crystal planes;
- and
- concave portions defined by the convex portions;
- and
- a unit light-emitting device comprising:
- a first conductive semiconductor layer disposed on the substrate;
- an active layer disposed on the first conductive semiconductor layer;
- and
- a second conductive semiconductor layer disposed on the active layer.
A substrate for a light-emitting diode (LED) comprising:
- concave-convex patterns disposed in an upper surface of the substrate, each concave-convex pattern comprising convex portions and concave portions defined by the convex portions,
- wherein the convex portions comprise facets that are crystal planes.
A method of fabricating a light-emitting diode (LED), comprising:
- forming an etching mask pattern on a substrate;
- forming concave-convex patterns in a surface of the substrate by wet-etching the substrate using the etching mask pattern as a mask, the concave-convex patterns comprising convex portions and concave portions defined by the convex portions;
- and
- forming a stacked body comprising:
- a first conductive semiconductor layer disposed on the substrate;
- an active layer disposed on the first conductive semiconductor layer;
- and
- a second conductive semiconductor layer disposed on the active layer.
Dependencies are inferred from the claim text.