Microwave ion source and method for starting same
AssigneeSumitomo Heavy Industries, Ltd.
InventorsNobuaki Takahashi, Hirohiko Murata
Life of this patent
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Abstract
A microwave ion source includes a plasma chamber, a magnetic field generator that generates a magnetic field in the plasma chamber, and a control unit that controls the magnetic field generator to apply an initial magnetic field for plasma ignition to the plasma chamber and change the initial magnetic field to a normal magnetic field after the plasma ignition. The plasma chamber may have a vacuum window that receives a microwave, and an ion extraction opening. The initial magnetic field may have a flat magnetic field distribution from the vacuum window to the ion extraction opening.
Claims6
A microwave ion source comprising:
- a plasma chamber;
- a magnetic field generator that generates a magnetic field in the plasma chamber;
- and
- a control unit that controls the magnetic field generator to apply an initial magnetic field for plasma ignition to the plasma chamber and change the initial magnetic field to a normal magnetic field after the plasma ignition.
A microwave ion source starting method comprising:
- applying an initial magnetic field for plasma ignition to a plasma chamber of a microwave ion source;
- and
- changing the initial magnetic field to a normal magnetic field after the plasma ignition.
Dependencies are inferred from the claim text.