Charged particle beam device
AssigneeHitachi High-Technologies Corporation
InventorsHisanao Akima, Yoichi Hirayama
Life of this patent
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Abstract
This charged particle beam device comprises: an electron beam source (1); a charged particle optical system that includes an object lens (9) and that irradiates a sample (10) with electrons emitted from the electron beam source (1) as an electron beam (2); an aberration corrector (6) that corrects aberrations in the charged particle optical system; and a control unit (24) that controls the components of the charged particle optical system and the aberration corrector (6). The charged particle beam device further comprises an automatic aberration-correcting device (17) that autonomously acquires, through leaning, optimum adjustment procedures in order to reduce the time required for correcting parasitic aberrations that arise in the aberration corrector (6).
Claims20
A charged particle beam device comprising:
- a charged particle beam source;
- a charged particle optical system irradiating a sample with a charged particle emitted from the charged particle beam source as a charged particle beam;
- an aberration corrector correcting an aberration of the charged particle optical system;
- and
- a control unit controlling various components of the charged particle optical system and the aberration corrector, wherein the charged particle beam device further comprises:
- an automatic aberration-correcting device autonomously acquiring optimum adjustment procedures by learning.
A charged particle beam device comprising:
- a charged particle beam source;
- a charged particle optical system irradiating a sample with a charged particle emitted from the charged particle beam source as a charged particle beam;
- an aberration corrector correcting an aberration of the charged particle optical system;
- a control unit controlling various components of the charged particle optical system and the aberration corrector;
- an aberration measurement unit measuring a plurality of aberration coefficients of the charged particle optical system;
- a storage device saving a value function table holding a value indicating which of a plurality of measurement aberration coefficients is to be corrected;
- a correction target judgment unit, based on the measured aberration coefficients and the value of the value function table, judging a plurality of aberrations to be corrected;
- and
- an aberration correction unit correcting the plurality of aberrations judged by the correction target judgment unit to be corrected.
A charged particle beam device comprising:
- a charged particle beam source;
- a charged particle optical system irradiating a sample with a charged particle emitted from the charged particle beam source as a charged particle beam;
- an evaluation unit evaluating, based on measurement results of aberration correction of the charged particle optical system, procedures of the correction carried out;
- a selector selecting, based on the evaluation, correction procedures more highly evaluated than other correction procedures;
- and
- an aberration corrector executing the selected correction procedures.
A charged particle beam device comprising:
- a charged particle beam source;
- a charged particle optical system irradiating a sample with a charged particle emitted from the charged particle beam source as a charged particle beam;
- an evaluation unit evaluating, based on measurement results of aberration correction of the charged particle optical system, procedures of the correction carried out;
- a table convertor, based on the evaluation, changing values of a table defining correction procedures;
- and
- an aberration corrector executing the correction procedures defined based on the table.
Dependencies are inferred from the claim text.