System and method for inspecting a sample using landing lens
AssigneeApplied Materials Israel Ltd.
InventorsYoram Uziel, Alon Litman, Ofer Adan, Ron Naftali, Juergen Frosien
Life of this patent
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Abstract
An evaluation system that includes a miniature module that comprises a miniature objective lens and a miniature supporting module; wherein the miniature supporting module is arranged, when placed on a sample, to position the miniature objective lens at working distance from the sample; wherein the miniature objective lens is arranged to gather radiation from an area of the sample when positioned at the working distance from the sample; a sensor arranged to detect radiation that is gathered by the miniature objective lens to provide detection signals indicative of the area of the sample.
Claims16
An evaluation system, comprising:
- a miniature module that comprises a miniature objective lens and a miniature supporting module;
- wherein the miniature supporting module is arranged, when placed on a sample, to position the miniature objective lens at working distance from the sample;
- wherein the miniature objective lens is arranged to gather radiation from an area of the sample when positioned at the working distance from the sample;
- a sensor arranged to detect radiation that is gathered by the miniature objective lens to provide detection signals indicative of the area of the sample.
A method for inspecting a sample, comprising:
- positioning a miniature module on the sample;
- wherein the miniature module comprises a miniature objective lens and a miniature supporting module;
- wherein the miniature supporting module is arranged, when placed on a sample, to position the miniature objective lens at working distance from the sample;
- wherein the miniature objective lens is arranged to gather radiation from an area of the sample when positioned at the working distance from the sample;
- illuminating the miniature objective lens with radiation;
- and
- detecting, by a sensor, radiation that is gathered by the miniature objective lens to provide detection signals indicative of the area of the sample.
An evaluation system, comprising:
- a miniature module;
- a manipulator that is arranged to position the miniature module in a close proximity to a sample;
- wherein the miniature module comprises a miniature objective lens and a miniature supporting module;
- wherein the miniature supporting module is arranged to be connected to the manipulator so that once positioned in a close proximity to the sample the miniature objective lens is located at working distance from the sample;
- wherein the miniature objective lens is arranged to gather radiation from an area of the sample when positioned at the working distance from the sample;
- a sensor arranged to detect radiation that is gathered by the miniature objective lens to provide detection signals indicative of the area of the sample.
Dependencies are inferred from the claim text.