Systems for Discretized Processing of Regions of a Substrate
AssigneeIntermolecular, Inc.
InventorsThomas R. Boussie, Tony P. Chiang, Alexander Gorer, David E. Lazovsky, Thomas H. McWaid
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Abstract
The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.
Claims20
A method of performing combinatorial processing on regions of a substrate, comprising:
- dispensing fluids into a plurality of dispensing cells;
- transferring the fluids from the plurality of dispensing cells to a plurality of processing cells in parallel;
- and
- combinatorially processing at least two regions of the substrate;
- wherein the at least two regions are defined by corresponding processing cells.
A method of performing combinatorial processing on regions of a substrate, comprising:
- dispensing fluids into a plurality of dispensing cells;
- transferring the fluids from the plurality of dispensing cells to the plurality of processing cells by an auto-delivery system;
- and
- combinatorially processing at least two regions of the substrate wherein the at least two regions are defined by corresponding processing cells;
- wherein a probe component of the auto-delivery system is heated and the heated probe component withdraws the fluids from the plurality of dispensing cells before the fluids are transferred to the plurality of processing cells;
- and
- wherein the fluids are transferred from the plurality of dispensing cells to the plurality of processing cells in parallel.
Dependencies are inferred from the claim text.