Layered product for magnetic element, thermoelectric conversion element having layered product, and method of manufacturing the same
AssigneesTohoku University, NEC Corporation
InventorsAkihiro Kirihara, Masahiko Ishida, Takashi Manako, Kenichi Uchida, Eiji Saitoh
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Abstract
A magnetic element according to the present invention is formed of a layered product having a magnetic insulator film formed on a substrate including a material having no crystal structure. The magnetic insulator film has a columnar crystal structure.
Claims17
A layered product for a magnetic element, wherein a magnetic insulator film is formed on a substrate including a material having no crystal structure on its surface, and the magnetic insulator film has a columnar crystal structure.
A layered product for a magnetic element, wherein a magnetic insulator film is formed on a substrate including a material having no crystal structure on its surface, the magnetic insulator film has a columnar crystal structure, and
- wherein a conductive film is further formed above the magnetic insulator film.
A method of manufacturing a layered product for a magnetic element comprising:
- preparing a substrate including a material having no crystal structure on its surface;
- and
- forming a magnetic insulator film on the substrate by a wet process,
- wherein the forming of the magnetic insulator film comprises applying a solution containing a magnetic insulator material onto the substrate and then annealing the substrate under an atmosphere such that the surface of the substrate serves as an adsorption film for oxygen, whereby the magnetic insulator film has a crystal structure, and no grain boundaries of crystal grains are present in a thickness direction within the magnetic insulator film.
Dependencies are inferred from the claim text.