Graphene defect alteration
AssigneeEmpire Technology Development LLC
InventorSETH ADRIAN MILLER
Life of this patent
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Abstract
Technologies are generally described for a method and system configured effective to alter a defect area in a layer on a substrate including graphene. An example method may include receiving and heating the layer to produce a heated layer and exposing the heated layer to a first gas to produce a first exposed layer, where the first gas may include an amine. The method may further include exposing the first exposed layer to a first inert gas to produce a second exposed layer and exposing the second exposed layer to a second gas to produce a third exposed layer where the second gas may include an alane or a borane. Exposure of the second exposed layer to the second gas may at least partially alter the defect area.
Claims24
A system for at least partially altering one or more defects in a layer on a substrate, wherein the layer comprises graphene, the system comprising:
- a chamber configured to receive the layer, wherein the layer comprises one or more defects in the graphene;
- and
- a container configured to be in communication with the chamber;
- wherein the chamber and the container are configured to expose the layer to a gas, wherein the gas comprises hydrogen and at least one of Boron (B), Aluminum (Al), Gallium (Ga), Indium (In) and Thallium (Tl);
- and
- wherein exposure of the layer to the gas at least partially alter the one or more defects in the graphene.
A chamber for at least partially altering one or more defects in a layer on a substrate, wherein the layer comprises graphene, the chamber comprising:
- an inlet port configured to receive a gas into the chamber, wherein the gas comprises hydrogen and at least one of Boron (B), Aluminum (Al), Gallium (Ga), Indium (In) and Thallium (Tl),
- wherein the chamber is configured to receive the layer, the layer comprising one or more defects in the graphene, and to expose the layer to the gas to at least partially alter the one or more defects in the graphene.
Dependencies are inferred from the claim text.