Structure for use with fluid diaphragm
AssigneeHORIBA STEC, Co., Ltd.
InventorsHidetaka Yada, Sotaro Kishida, Takehisa Hataita
Life of this patent
Estimating the term…
Loading patent…
AssigneeHORIBA STEC, Co., Ltd.
InventorsHidetaka Yada, Sotaro Kishida, Takehisa Hataita
Estimating the term…
A structure comprising: a base; a diaphragm; a peripheral wall member of which one end surface is attached to a circumferential edge part of the diaphragm and the other end surface is attached on the top surface of the base to form an internal space together with the base and the diaphragm; a protruding part that protrudes from the top surface of the base; and a communicatively connecting path that extends from a bottom surface side of the base toward the diaphragm, and communicatively connects the internal space and the outside to each other to flow fluid, wherein on an outer lateral surface of the protruding part, an opening is formed in a part intersecting with an inner lateral surface of the communicatively connecting path, and a part of a fore end inner surface of the communicatively connecting path is formed in the protruding part.
A structure comprising:
A diaphragm supporting member attached with:
Dependencies are inferred from the claim text.