Spring system for mems device

A method of fabricating a microelectromechanical systems (MEMS) device comprising:

• forming a first movable mass, a second movable mass, and a sense frame surrounding said first and second movable masses on a planar substrate;
• forming a spring system, said spring system including a set of stiff beams oriented relative to one another to form a parallelogram arrangement, a first side spring, and a second side spring;
• and
• wherein said spring system is coupled to said first and second movable masses such that said beams are oriented diagonal to a drive direction of said first and second movable masses, wherein a first corner of said parallelogram arrangement is coupled to said first movable mass, a second corner of said parallelogram arrangement is coupled to said second movable mass, said second corner being diagonally opposite said first corner, and wherein said first side spring is coupled to a third corner of said parallelogram arrangement, said second side spring is coupled to a fourth corner of said parallelogram arrangement, said fourth corner being diagonally opposite said third corner.

A microelectromechanical systems (MEMS) device comprising:

• a substrate having a planar surface;
• a sense frame suspended above and movably anchored to said planar surface, said sense frame having a central opening;
• a first drive mass;
• a second drive mass, said first and second drive masses being positioned within said central opening of said sense frame;
• and
• a spring system configured to reduce in-phase motion of said first and second movable masses, said spring system including:
• a set of stiff beams oriented relative to one another to form a parallelogram arrangement, said beams being oriented diagonal to a drive direction of said first and second movable masses, a first corner of said parallelogram arrangement being coupled to said first movable mass and a second corner of said parallelogram arrangement being coupled to said second movable mass, said second corner being diagonally opposite said first corner;
• a first side spring coupled to a third corner of said parallelogram arrangement, and having first opposing ends interconnected with said sense frame;
• and
• a second side spring coupled to a fourth corner of said parallelogram arrangement, and having second opposing ends interconnected with said sense frame, said fourth corner being diagonally opposite said third corner, said first and second side springs being stiff in said drive direction and compliant in a second direction that is orthogonal to said drive direction.