Microelectromechanical Bulk Acoustic Wave Devices and Methods

A device comprising:

• a substrate;
• a resonator comprising:
• a first predetermined portion comprising a ring oscillating in at least one bulk acoustic mode;
• a second predetermined portion within the ring oscillating in at least one flexural mode and comprising at least a plurality of radial spokes from a central element to the ring;
• and
• a plurality of capacitively coupled structures disposed in predetermined locations around the resonator, a first subset of the capacitively coupled structures receiving drive signals to excite the resonator into resonance and a second subset of the capacitively coupled structures to generate sense signals in response to motion of the resonator relative to the capacitively coupled structures.

A device comprising:

• a central mounting element;
• a resonator disc supported by the central mounting element and comprising a dodecagonal disc;
• a contact pad on the upper surface of the resonator disc;
• and
• a plurality of capacitively coupled structures disposed in predetermined locations around the resonator, a first subset of the capacitively coupled structures receiving drive signals to excite the resonator into resonance and a second subset of the capacitively coupled structures to generate sense signals in response to motion of the resonator disc relative to the capacitively coupled structures.