Microelectromechanical device with signal routing through a protective cap
AssigneeSTMicroelectronics S.r.l.
InventorsGiorgio Allegato, Barbara Simoni, Carlo Valzasina, Lorenzo Corso
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AssigneeSTMicroelectronics S.r.l.
InventorsGiorgio Allegato, Barbara Simoni, Carlo Valzasina, Lorenzo Corso
Estimating the term…
A microelectromechanical device includes: a body accommodating a microelectromechanical structure; and a cap bonded to the body and electrically coupled to the microelectromechanical structure through conductive bonding regions. The cap including a selection module, which has first selection terminals coupled to the microelectromechanical structure, second selection terminals, and at least one control terminal, and which can be controlled through the control terminal to couple the second selection terminals to respective first selection terminals according, selectively, to one of a plurality of coupling configurations corresponding to respective operating conditions.
A microelectromechanical device, comprising:
An electrical system, comprising:
A method, comprising:
A device, comprising:
Dependencies are inferred from the claim text.