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US 2014/0230522 A1Published application
Cleanliness measuring carriage and cleanliness measuring system
AssigneeKabushiki Kaisha Toshiba
InventorsEri UEMURA, Makiko KATANO, Tsunekazu YASUTAKE
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Abstract
A cleanliness measuring carriage includes a cleanliness measuring device for measuring cleanliness within a semiconductor manufacturing room, a holding unit for holding the cleanliness measuring device, and a conveying unit for conveying the cleanliness measuring device along a substrate container transport lane.
Claims20
A cleanliness measuring carriage, comprising:
- a cleanliness measuring device for monitoring cleanliness within a semiconductor manufacturing room;
- a holding unit for supporting the cleanliness measuring device;
- and
- a conveying unit for transferring the cleanliness measuring device along a substrate container transport lane.
1 more element
A cleanliness measuring system, comprising:
- a conveying lane provided within a semiconductor manufacturing room;
- a substrate conveying carriage adapted to travel along the conveying lane to convey a substrate conveying container;
- and
- a cleanliness measuring carriage adapted to travel along the conveying lane,
- wherein the cleanliness measuring carriage comprises:
- a cleanliness measuring device for monitoring cleanliness within the semiconductor manufacturing room;
- a holding unit for supporting the cleanliness measuring device;
- a conveying unit for conveying the cleanliness measuring device along a substrate container transport lane.
5 more elements
Dependencies are inferred from the claim text.