Cryopump and cryopump mounting structure
AssigneeSumitomo Heavy Industries, Ltd.
InventorKen Oikawa
Life of this patent
Estimating the term…
Abstract
A cryopump for evacuating a vacuum chamber is provided with a radiation shield provided with a shield opening end surrounding a shield opening for receiving a gas and a lid member having a connection opening narrower than a shield opening for connecting the shield opening to the vacuum chamber. The lid member is provided with a first mounting flange for mounting the cryopump on a mating flange provided with the vacuum chamber. The first mounting flange surrounds the connection opening on a vacuum chamber side of the lid member.
Claims7
A cryopump for evacuating a vacuum chamber, the cryopump comprising:
- a radiation shield comprising a shield opening end surrounding a shield opening for receiving a gas;
- and
- a lid member having a connection opening narrower than the shield opening for connecting the shield opening to the vacuum chamber, wherein the lid member comprises a first mounting flange configured to mount the cryopump on a mating flange provided with the vacuum chamber, the first mounting flange surrounding the connection opening on a vacuum chamber side of the lid member.
A cryopump mounting structure for mounting a cryopump on a mating flange provided with a vacuum chamber, the cryopump configured to evacuate the vacuum chamber and comprising an inlet flange surrounding an inlet, the mounting structure comprising:
- a lid member having a connection opening for connecting the inlet to the vacuum chamber, wherein the lid member comprises a first mounting flange surrounding the connection opening on a vacuum chamber side of the lid member and configured to mount the lid member on the mating flange, and a second mounting flange surrounding the connection opening on a cryopump side of the lid member and configured to mount the lid member on the inlet flange.
Dependencies are inferred from the claim text.