Cryopump and method of operating the cryopump
AssigneeSumitomo Heavy Industries, Ltd.
InventorKakeru Takahashi
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Abstract
A cryopump includes a high-temperature cryopanel, a low-temperature cryopanel, and a cooling system. The cooling system has: a refrigerator provided with a first stage for cooling the high-temperature cryopanel and a second stage for cooling the low-temperature cryopanel; and a control unit configured to control a cool-down operation in which the first stage and the second stage are cooled in order to initiate a vacuum pumping operation of the cryopump. The cooling system may be configured to selectively provide a cooling relief effect to the first stage at least temporarily in the cool-down operation.
Claims6
A cryopump comprising:
- a high-temperature cryopanel;
- a low-temperature cryopanel;
- and
- a cooling system comprising:
- a refrigerator comprising a high-temperature stage for cooling the high-temperature cryopanel and a low-temperature stage for cooling the low-temperature cryopanel;
- and
- a control unit configured to control a cool-down operation in which the high-temperature stage and the low-temperature stage are cooled in order to initiate a vacuum pumping operation of the cryopump, wherein
- the cooling system is configured to provide a cooling relief effect selectively to the high-temperature stage at least temporarily during the cool-down operation.
A method of operating a cryopump comprising:
- cooling a cryopanel from an initial temperature higher than a cryogenic temperature for a vacuum pumping operation to the cryogenic temperature by using a refrigerator;
- and
- after the cooling, initiating the vacuum pumping operation, wherein
- the cooling includes providing a cooling relief effect selectively to a high-temperature stage of the refrigerator.
Dependencies are inferred from the claim text.