Modular Exhaust Gas Header And Method Of Incorporating Same In Design Layout For A Manufacturing Process Machine

A modular exhaust gas header system for use with a semiconductor processing machine having plural exhaust gas points, said system comprising:

• a plurality of branch ducts, each branch duct configured at a first end to be connected to at least one said exhaust gas point of the semiconductor processing machine in fluid communication therewith;
• at least one flow control device disposed in each of said plurality of branch ducts to adjustably control exhaust gas flow through each said branch duct;
• at least one said impulse line connected to each of said plurality of branch ducts between the first end and the at least one flow control device;
• a multi-position valve fluidly connected to each said impulse line opposite the respective branch ducts for fluid communication with said branch ducts through said impulse lines, said multi-position valve configured for selection of one of said connected impulse lines;
• a pressure measurement device fluidly communicating with said multi-position valve for fluid communication with the selected impulse line;
• and
• at least one primary exhaust gas duct connected to said plurality of branch ducts at a second end to receive exhaust gas therefrom.

A modular exhaust gas header system for use with a semiconductor processing machine having plural exhaust gas points, said system comprising:

• a header unit configured to transport one or more of high-temperature gases, corrosive gases and gases with volatile solvents produced in semiconductor processing, the header unit comprising a plurality of branch ducts connected to at least one primary exhaust gas duct for fluid communication there between, each said branch duct having at least one flow control device disposed therein to adjustably control exhaust gas flow through said branch duct, and said branch ducts being configured to be fluidly connected to at least one said exhaust gas point of the semiconductor processing machine at a first end opposite the connection to said at least one primary exhaust gas duct;
• a pressure sensor configured to measure pressure in a selected one of said plurality of branch ducts;
• and
• at least one said impulse line connected to each of said plurality of branch ducts at a connection disposed between said first end and the at least one flow control device to fluidly couple each said branch duct with said pressure sensor.

A method of designing an exhaust gas system for a manufacturing facility having at least one manufacturing process tool with a plurality of exhaust gas points of connection and an exhaust gas handling system, the method comprising:

• determining the location of a manufacturing process tool in a manufacturing facility;
• selecting a modular exhaust gas header built outside the manufacturing facility for use with the manufacturing process tool, the modular exhaust gas header having a plurality of branch ducts, at least one for each of the exhaust gas points of connection in the manufacturing tool, so that each of the exhaust gas points of connection of the process tool may be connected to a corresponding respective one of the plurality of branch ducts, the modular exhaust gas header having a primary duct fluidly connected with the plurality of branch ducts;
• determining the location of the modular exhaust header with respect to the process tool;
• and
• designing any ductwork connections required for connecting the primary duct with the exhaust gas handling system and for connecting the branch ducts with the exhaust gas points of connection.

A method of installing an exhaust gas system, comprising:

• designing a modular exhaust gas header for use with a first manufacturing process tool having a plurality of exhaust gas points of connection and intended for installation in a manufacturing space, wherein said designing step is performed with respect to the first manufacturing process tool but not with respect to the manufacturing space in which the header will be installed;
• fabricating a modular exhaust gas header in a facility separate from the manufacturing space, the header having a plurality of branch ducts, each one of said plurality of branch ducts being designed for attachment to a corresponding one of the plurality of exhaust gas points of connection of the manufacturing process tool;
• fluidly connecting the modular exhaust gas header to an exhaust gas handling system for the manufacturing space so that exhaust gases present in the header may be transported to the exhaust gas handling system;
• and
• connecting the modular exhaust gas header in the manufacturing facility to the manufacturing process tool so that each exhaust gas point of connection is fluidly connected to the header so that exhaust gases emitted from each exhaust gas point of connection may be transported to the modular exhaust gas header.