Diffusion-agent composition, method for forming impurity-diffusion layer, and solar cell
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsTakashi Kamizono, Toshiro Morita
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AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsTakashi Kamizono, Toshiro Morita
Estimating the term…
A diffusion-agent composition including a borate ester (A); a polyhydric alcohol (B) represented by general formula (1); and an alkoxysilane compound (C). In general formula (1), k represents an integer from 0 to 3, m represents an integer of 1 or more, and R2 and R3 each independently represent a hydrogen atom, a hydroxyl group, a C1-5 alkyl group, or a C1-5 hydroxyalkyl group. When there are a plurality of R2s and R3s, the plurality of R2s and R3s may be the same as or different from one another. When k is 2 or more, the plurality of R2s and R3s always include at least one or more hydroxyl groups or C1-5 hydroxyalkyl groups having 1 to 5 carbon atoms. R4 and R5 each independently represent a hydrogen atom or a C1-3 alkyl group.
A diffusing agent composition used to form an impurity-diffusing agent layer on a semiconductor substrate, comprising:
(canceled)
Dependencies are inferred from the claim text.