Passivation layer removal by delivering a split laser pulse
AssigneeApplied Materials, Inc.
InventorsJeffrey L. FRANKLIN, Yi ZHENG
Life of this patent
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Abstract
Embodiments of the present invention generally provide methods for forming features or holes in a passivation layer without damaging the underlying solar cell substrate. A source laser beam is split into a first laser beam and a second laser beam. The first laser beam is modified to have a different wavelength than the source laser beam. The second laser beam is delayed for a predetermined time, and the first and second laser beams are delivered to a surface of the substrate.
Claims20
A method for forming a feature on a substrate, comprising:
- receiving a source laser beam having a first wavelength;
- splitting the source laser beam to form a first laser beam and a second laser beam;
- modifying the first laser beam so that the first laser beam has a second wavelength;
- delaying the second laser beam for a predetermined time;
- and
- delivering the first and second laser beams to a surface of the substrate.
A method for forming a feature on a substrate, comprising:
- receiving a source laser beam having a first wavelength;
- splitting the source laser beam to form a first laser beam and a second laser beam;
- modifying the first laser beam so that the first laser beam has a second wavelength;
- modifying the energy profiles of the first and the second laser beams;
- and
- delivering the first and second laser beams to a surface of the substrate.
A method for forming a feature on a substrate, comprising:
- receiving a source laser beam having a first wavelength;
- splitting the source laser beam to form a first laser beam and a second laser beam;
- modifying the first laser beam so that the first laser beam has a second wavelength;
- modifying the energy profiles of the first and the second laser beams;
- delaying the second laser beam for a predetermined time;
- and
- delivering the first and second laser beams to a surface of the substrate.
Dependencies are inferred from the claim text.