Method of forming nano crystals and method of manufacturing organic light-emitting display apparatus including thin film having the same
AssigneeSamsung Display Co., Ltd.
InventorsMyung-Soo Huh, Cheol-Lae Roh, Seung-Ho Choi
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Abstract
A method of forming nanocrystals and a method of manufacturing an organic light-emitting display apparatus that includes a metal compound thin film having the nanocrystals. The method of forming nanocrystals includes forming a metal compound thin film under a first pressure by using a reactive sputtering process, and forming the nanocrystals in the metal compound thin film under a second pressure that is lower than the first pressure by using the reactive sputtering process.
Claims20
A method of forming nanocrystals, the method comprising:
- forming a metal compound thin film under a first pressure by performing a reactive sputtering process;
- and
- forming the nanocrystals in the metal compound thin film under a second pressure that is lower than the first pressure by performing the reactive sputtering process.
A method of manufacturing an organic light-emitting display apparatus, the method comprising:
- forming a metal compound thin film on a substrate on which at least a portion of constituent elements of the organic light-emitting display apparatus is formed under a first pressure by using a reactive sputtering process;
- and
- forming nanocrystals in the metal compound thin film under a second pressure that is lower than the first pressure by using the reactive sputtering process.
Dependencies are inferred from the claim text.